Position: This page is about a precision silicon weighing sensor product from VTT TECHNOLOGIES.
SOLUTION AND ITS BENEFITS
The weighing sensor has an elastically suspended upper electrode and a lower electrode. The upper electrode, or a structure connected to it, acts as a pan surface. A device keeps the electrodes at a constant spacing, irrespective of a mass being weighed. The mass can be resolved from a feedback signal.
COMPETITIVE ADVANTAGE
This weighing sensor has improved stability and small size. Can measure one gram with an weighing accuracy of one millionth part per gram, or better.
TECHNICAL DESCRIPTION
At least one electrode is divided into at least two areas, to electrically control the electrode surfaces, so that they remain parallel, by separately adjusting the force on each partial electrode surface. The upper electrode is suspended on three symmetrical radial beams (1). The beams act as springs, yielding elastically vertically. The other ends of the beams are connected to a silicon substrate (4). The lower electrode (15) is circular. The device is formed by bonding a micromachined substrate on a glass plate (8), on which the lower electrode is patterned.
INTELLECTUAL PROPERTY
Oja A; Sepp? H; Sillanp?? T: Micromechanical precision silicon scale
* Priority date: 19981230
*WO 9967605 A1, FI 9802832 A, FI 105237 B1, US 6513388 B1
* IPC RECLASSIF.: G01G0003-00 [I,C]; G01G0003-12 [I,A]; G01G0007-00 [I,C]; G01G0007-06 [I,A]
Contact
Mika Naumanen
Business Development Manager
Tel. +358 20 722 4245
GSM: +358 40 536 0868
Email: mika.naumanen@vtt.fi
P.O. BOX 1000
FI-02044 VTT
FINLAND
